Cluster beam microfabrication of SiC pattern on Si(1 0 0)

Surface Science

Volumn 544, Issue 2-3, 2003, Pages

  Magnano, E ^a   Padovani, M ^b   Spreafico, V ^b   Sancrotti, M ^a,b   Podesta, A ^c   Barborini, E ^c   Piseri, P ^c   Milani, P ^c  

^a LABORATORIO TASC   (Italy)

^b UNIVERSITÀ CATTOLICA DEL SACRO CUORE   (Italy)

^c UNIVERSITY OF MILAN   (Italy)

Author keywords

Atomic force microscopy; Carbon; Clusters; Scanning electron microscopy (SEM); Silicon carbide

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CHEMICAL BONDS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE;

MICROSIZED ARRAYS;

SURFACE PHENOMENA;

EID: 0141924623     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2003.08.008     Document Type: Article

References (23)

1. Mehregany M., Zorman C.A. MRS Bull. 26:2001;289.
2. Elders J., Spiering V., Walsh S. MRS Bull. 26:2001;312.
3. Yi G., Eres G., Lowndes D.H. J. Vac. Sci. Technol. B. 17:1999;2600.
4. Yang Y.T.et al. Appl. Phys. Lett. 78:2001;162.
5. Gao D., Howe R.T., Maboudian R. Appl. Phys. Lett. 82:2003;1742.
6. Milani P., Iannotta S. Cluster Beam Synthesis of Nanostructured Materials. 1999;Springer, Berlin.
7. Hamza A.V., Baaloch M., Moalem M. Surf. Sci. 317:1994;L1129.
8. Verucchi R., Aversa L., Ciullo G., Podesta' A., Milani P., Iannotta S. Eur. Phys. J. B. 26:2002;509.
9. Piseri P., Podestà A., Barborini E., Milani P. Rev. Sci. Instrum. 72:2001;2261.
10. Barborini E., Piseri P., Podesta' A., Milani P. Appl. Phys. Lett. 77:2000;1059.
11. Magnano E., Cepek C., Sancrotti M., Siviero F., Vinati S., Lenardi C., Barborini E., Piseri P., Milani P. Phys. Rev. B. 67:2003;125414.
12. Milani P., Podesta' A., Piseri P., Barborini E., Lenardi C., Castelnovo C. Diamond Rel. Mater. 10:2001;240.
13. see for example Ramaker David E. Crit. Rev. Solid State Mater. Sci. 17:1991;211.
14. Nelson A.J., Mason A.R., Swartzlander A.B., Kazmerski L.L., Saxena N., Fortmann C.M., Russell T.W.F. J. Vac. Sci. Technol. A. 8:1990;1538.
15. Madden H.H. J. Vac. Sci. Technol. 18:1980;677.
16. Gölz A., Lucovsky G., Koh K., Wolfe D., Niimi H., Kurz H. J. Vac. Sci. Technol. B. 15:1997;1097.
17. Morgen P., Seaward K.L., Barbee T.W. Jr. J. Vac. Sci. Technol. A. 3:1985;2108.
18. Durbin S.M., Gog T. Phys. Rev. Lett. 63:1989;1304.
19. Goldstein J.I., Newbury D.E., Echlin P., Joy D.C., Fiori C., Lifshin E. Scanning Electron Microscopy and X-ray Microanalysis. 1997;Plenum Press.
20. Zekentes K., Papaioannou V., Pecz B., Stoemenos J. J. Cryst. Growth. 157:1995;392.
21. Volz K., Schreiber S., Gerlach J.W., Reiber W., Rauschenbach B., Stritzker B., Assmann W., Ensinger W. Mat. Sci. Eng. A. 289:2000;255.
22. Chen D., Workman R., Sarid D. Surf. Sci. 344:1995;23.
23. Magnano E., Cepek C., Sancrotti M., Siviero F., Vinati S., Lenardi C., Barborini E., Piseri P., Milani P. Appl. Surf. Sci. 212-213:2003;879.