Creation of multiple nanodots by single ions

Nature Nanotechnology

Volumn 2, Issue 5, 2007, Pages 290-294

  Akcöltekin, Ender ^a   Peters, Thorsten ^a   Meyer, Ralf ^a   Duvenbeck, Andreas ^a   Klusmann, Miriam ^a   Monnet, Isabelle ^b   Lebius, Henning ^b   Schleberger, Marika ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b Centre Interdisciplinaire de Recherche Ions Lasers   (France)

Author keywords

[No Author keywords available]

Indexed keywords

HEAVY IONS; NANOSTRUCTURED MATERIALS;

ELECTRONIC EXCITATION; ENERGY DEPOSITIONS; GRAZING ANGLES; LARGE VOLUMES; LOW ENERGY IONS; MODIFY SURFACE; NORMAL INCIDENCE; RANDOMLY DISTRIBUTED;

NANODOTS;

QUANTUM DOT; XENON;

ARTICLE; DIELECTRIC CONSTANT; ENERGY TRANSFER; LOW ENERGY RADIATION; MOLECULAR DYNAMICS; MOLECULAR INTERACTION; PARTICLE SIZE; PRIORITY JOURNAL; QUANTUM MECHANICS; SURFACE PROPERTY;

EID: 34250019151     PISSN: 17483387     EISSN: 17483395     Source Type: Journal    
DOI: 10.1038/nnano.2007.109     Document Type: Article

References (33)

1. Bethe, H. Zur Theorie des Durchgangs schneller Korpuskularstrahlen durch Materie. Ann. Phys. 397, 325-400 (1930).
2. Bloch, F. Zur Bremsung rasch bewegter Teilchen beim Durchgang durch Materie. Ann. Phys. 408, 285-320 (1933).
3. Lindhard, J., Scharff, M. & Schiøtt, H. E. Range concepts and heavy ion ranges (Notes on atomic collisions, II). Mat. Fys. Medd. Dan. Vid. Selsk. 33, 1-42 (1963).
4. Neumann, R. Scanning probe microscopy of ion-irradiated materials. Nucl. Instrum. Methods B 151, 42-55 (1999).
5. Bouffard, S., Cousty, J., Pennec, Y. & Thibaudau, F. STM and AFM observations of latent tracks. Radiat. Eff. Defects Solids 126, 225-228 (1993).
6. 2 studied with atomic force microscopy in air and in vacuum. Nucl. Instrum. Methods B 245, 246-249 (2006).
7. 2 decomposition by using different dielectric materials. Fuel Processing Technol. 87, 617-622 (2006).
8. Thevuthasan, S., Shutthanandan, V. & Zhang, Y. Applications of high energy ion beam techniques in environmental science: Investigation associated with glass and ceramic waste forms. J. Electr. Spectr. Rel. Phen. 150, 195-207 (2006).
9. 3 on silicon for metal-insulator-semiconductor gate dielectric applications. IEEE Electron. Device Lett. 24, 218-220 (2003).
10. Först, C. J., Ashman, C. R., Schwarz, K. & Blöchl, P. E. The interface between silicon and a high-k oxide. Nature 427, 53-56 (2004).
11. 7 -δ thin films. Phys. Rev. B 71, 174508 (2005).
12. 3 films. Appl. Phys. Lett. 85, 5899-5901 (2004).
13. Szafraniak, I. et al. Ferroelectric epitaxial nanocrystals obtained by a self-patterning method. Appl. Phys. Lett. 83, 2211-2213 (2003).
14. 3 by 30 keV ion irradiation. Surf. Sci. 547, L847-L852 (2003).
15. Shin, H.-J. et al. Patterning of ferroelectric nanodot arrays using a silicon nitride shadow mask. Appl. Phys. Lett. 87, 113114 (2005).
16. Ruzmetov, D. et al. Epitaxial magnetic perovskite nanostructures. Adv. Mater. 17, 2869-2872 (2005).
17. Seitz, F. & Koehler, J. S. Displacement of atoms during irradiation, in Solid State Physics: Advances in Research and Applications 2, (eds Seitz, F. & Turnbull, D.) 305-448 (1956).
18. Toulemonde, M., Dufour, C. & Paumier, E. Transient thermal process after a high-energy heavy-ion irradiation of amorphous metals and semiconductors. Phys. Rev. B 46, 14362-14369 (1992).
19. Morgan, D. V. & Chadderton, L. T. Fission fragment tracks in semiconducting layer structures. Phil. Mag. 17, 1135-1143 (1968).
20. Fleischer, R. L., Price, P. B. & Walker, R. M. Ion explosion spike mechanism for formation of charged-particle tracks in solids. J. Appl. Phys. 36, 3645-3652 (1965).
21. Klaumünzer, S. Ion tracks in quartz and vitreous silica. Nucl. Instrum. Methods B 225, 136-153 (2004).
22. Shima, K., Ishihara, T., Miyoshi, T. & Mikumo, T. Equilibrium charge-state distributions of 35-146-MeV Cu ions behind carbon foils. Phys. Rev. A 28, 2162-2168 (1983).
23. Shima, K., Kuno, N. & Yamanouchi, M. Systematics of equilibrium charge distributions of ions passing through a carbon foil over the ranges Z = 4-92 and E = 0.02-6 MeV/u. Phys. Rev. A 40, 3557-3570 (1989).
24. Toulemonde, M., Dufour, C. & Paumier, E. The ion-matter interaction with swift heavy ions in the light of inelastic thermal spike model. Acta Physica Polonica A 109, 311-322 (2006).
25. 2 quartz and the thermal-spike mechanism. Phys. Rev. B 49, 12457-12463 (1994).
26. Szenes, G. General features of latent track formation in magnetic insulators irradiated with swift heavy ions. Phys. Rev. B 51, 8026-8029 (1995).
27. Carvalho, A. M. J. F. et al. Discontinuous ion tracks on silicon oxide on silicon surfaces after grazing-angle heavy ion irradiation. Appl. Phys. Lett. 90, 073116 (2007).
28. Ziegler, J. F. & Biersack, J. P. The stopping and range of ions in matter; http://www.SRIM.org, Version 2003.26.
29. Horcas, I. et al. A software for scanning probe microscopy and a tool for nanotechnology. Rev. Sci. Instr. 78, 013705 (2007).
30. The abinit code is a common project of the Université Catholique de Louvain, Corning Incorporated, and other contributors. http://www.abinit.org
31. Fuchs, M. & Scheffler, M. Ab initio pseudopotentials for electronic structure calculations of polyatomic systems using density-functional theory. Comput. Phys. Commun. 119, 67-98 (1999).
32. Perdew, J. P., Burke, K. & Ernzerhof, M. Generalized gradient approximation made simple. Phys. Rev. Lett. 77, 3865-3868 (1996).
33. Lindhard, J. & Scharff, M. Energy dissipation by ions in the kev region. Phys. Rev. 124, 128-130 (1961).