Surface structure dependence of impact processes of gas cluster ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 216, Issue 1-4, 2004, Pages 185-190

  Aoki, Takaaki ^a,b,c   Matsuo, Jiro ^a  

^a KYOTO UNIVERSITY   (Japan)

^b Collab Res Ctr Cluster Ion BPT ^*  (Japan)

^c Collab Res Ctr N SMAQBT ^*  (Japan)

Author keywords

Cluster; Molecular dynamics simulation; Surface morphology

Indexed keywords

CLUSTER; MOLECULAR DYNAMICS (MD) SIMULATION;

ARGON; COMPUTER SIMULATION; GASES; MOLECULAR DYNAMICS; MORPHOLOGY; SILICON; SPUTTERING; SURFACE ROUGHNESS; SURFACE STRUCTURE;

IONIZING RADIATION;

EID: 1042298613     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.11.077     Document Type: Conference Paper

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