SiO2 film formation at room temperature by gas cluster ion beam oxidation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 112, Issue 1-4, 1996, Pages 83-85

  Akizuki, M ^a   Matsuo, J ^a   Yamada, I ^a   Harada, M ^b   Ogasawara, S ^b   Doi, A ^b  

^a KYOTO UNIVERSITY   (Japan)

^b SANYO ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; INTERFACES (MATERIALS); OXIDATION; SILICA; SUBSTRATES; SURFACE TREATMENT; THERMAL EFFECTS; THIN FILMS;

GAS CLUSTER ION BEAM OXIDATION;

ION BEAM LITHOGRAPHY;

EID: 0030563473     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01235-4     Document Type: Article

References (15)

1. I. Yamada, W.L. Brown, J.A. Northby and M. Sosnowski, Nucl. Instr. and Meth. B 79 (1993) 223.
2. I. Yamada, J. Matsuo, Z. Insepov and M. Akizuki, Nucl. Instr. and Meth. B 106 (1995) 165.
3. G.H. Takaoka, G. Sugahara, R.E. Hummel, J.A. Northby, M. Sosnowski and I. Yamada, Mater. Res. Soc. Symp. Proc. 316 (1994) 1005.
4. I. Yamada, G.H. Takaoka, M. Akizuki, C.E. Ascheron and J. Matsuo, Proc. 10th Int. Conf. on Ion Implantation Technology, eds. S. Coffa et al. (Elsevier, Amsterdam, 1995) p. 1002.
5. J. Matsuo, M. Akizuki, J.A. Northby, G.H. Takaoka and I. Yamada, Surf. Rev. Lett, in press.
6. M. Akizuki, M. Harada, Y. Miyai, A. Doi, K. Yoneda, T. Yamaguchi, J. Matsuo, G.H. Takaoka, C.E. Ascheron and I. Yamada, Surf. Rev. Lett., in press.
7. P.R.W. Henkes and R. Klingelhofer, Vacuum 39 (1989) 541.
8. M. Akizuki, J. Matsuo, M. Harada, S. Ogasawara, A. Doi, K. Yoneda, T. Yamaguchi, G.H. Takaoka, C.E. Ascheron and I. Yamada, Nucl. Instr. and Meth. B 99 (1995) 229.
9. J. Batey and E. Tiemey, J. Appl. Phys. 60 (1986) 3136.
10. T. Yasuda, Y. Ma, S. Habermehl and G. Licovsky, Appl. Phys. Lett. 60 (1992) 434.
11. Y. Kawai, N. Konishi, J. Watanabe and T. Ohmi, Appl. Phys. Lett. 64 (1994) 2223.
12. S.S. Todorov and E.R. Fossum, J. Vac. Sci. Technol. B 6(1) (1988) 466.
13. H. Falter, O.F. Hagena, W. Henkes and H.V. Wedel, Int. J. Mass Spectrom. and Ion Phys. 4 (1970) 145.
14. Z. Insepov, M. Sosnowski and I. Yamada, Proc. 3rd IUMRS Int. Conf. on Adv. Mater., Tokyo, 1993, Adv. Mater. '93, Laser and Ion Beam Modification of Materials, eds. I. Yamada et al. (Elsevier, Amsterdam, 1994) p. 111.
15. M. Akizuki, J. Matsuo, S. Ogasawara, M. Harada, A. Doi, I. Yamada, Jpn. J. Appl. Phys. 35 (1996) in press.