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Volumn 111, Issue 2-3, 1999, Pages 119-122
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Structural and tribological characteristics of carbon nitride films deposited by the reactive ionized-cluster beam technique
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Author keywords
Carbon nitride films; Reactive ionized cluster beam technique; Structure; Tribological properties
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Indexed keywords
CARBON NITRIDE;
FILM PREPARATION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
FRICTION;
RAMAN SPECTROSCOPY;
SYNTHESIS (CHEMICAL);
TRIBOLOGY;
X RAY PHOTOELECTRON SPECTROSCOPY;
CARBON INORGANIC COMPOUNDS;
CHEMICAL BONDS;
DEPOSITION;
HARDNESS;
RAMAN SCATTERING;
THIN FILMS;
WEAR OF MATERIALS;
REACTIVE IONIZED-CLUSTER BEAM DEPOSITION;
PROTECTIVE COATINGS;
NITRIDES;
FILM;
NITRIDING;
STRUCTURAL ANALYSIS;
TRIBOLOGY;
CARBON NITRIDE;
FRICTION COEFFICIENTS;
REACTIVE IONIZED-CLUSTER CARBON BEAM TECHNIQUE;
TRIBOMETERS;
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EID: 0032665464
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(98)00706-3 Document Type: Article |
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Times cited : (27)
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References (13)
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