Hard coatings (TiN, TixAl1-xN) deposited at room temperature by energetic cluster impact

Surface and Coatings Technology

Volumn 100-101, Issue 1-3, 1998, Pages 27-32

  Qiang, Y ^a   Thurner, Y ^a   Reiners, Th ^a   Rattunde, O ^a   Haberland, H ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Energetic cluster deposition; Films stresses; Mechanical properties; Microstructure; Surface roughness

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; MICROSTRUCTURE; MORPHOLOGY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STRESS ANALYSIS; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM NITRIDE; VAPOR DEPOSITION;

ENERGETIC CLUSTER DEPOSITION; HARD COATINGS;

CERAMIC COATINGS;

EID: 0032021833     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00583-5     Document Type: Article

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