Nano-scale surface texture by impact of accelerated condensed-gas nanoparticles

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4806, Issue , 2002, Pages 225-232

  Allen, L P ^a   Fenner, D B ^a   Santeufemio, C ^a   Brooks, W ^a   Hautala, J ^a   Shao, Y ^a  

^a Epion Corporation   (United States)

Author keywords

Gas cluster ion beam; GCIB; Nanocluster; Nanoparticle

Indexed keywords

ACCELERATION; ARGON; CHEMICAL REACTIONS; CRYSTALLOGRAPHY; ION BEAMS; MOLECULAR ORIENTATION; OPTICAL PROPERTIES; SEMICONDUCTING FILMS; SILICA; SURFACE ROUGHNESS; TEXTURES; VACUUM APPLICATIONS;

CONDENSED-GAS NANOPARTICLES; SURFACE TEXTURES;

MICROELECTRONICS;

EID: 0036425570     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472987     Document Type: Conference Paper

References (15)

1. E.W. Becker, K. Bier, W. Henkes, Z. Phys. 146 (1956) 333.
2. I. Yamada, J. Matsuo, N. Toyoda, A. Kirkpatrick, Materials Science and Engineering R 34 (2001) 231-295.
3. th Symposium on Ion Sources and Ion-Assisted Technology, Tokyo, The Ion Engineering Society of Japan, Tokyo, 1991, p. 227.
4. P. von Blanckenhagen, A. Gruber, J. Gspann, Atomic force microscopy of high velocity cluster impact induced nanostructures, Nuclear Instruments and methods in Physics Research B 122 (1997) 322-324.
5. T. Geherels, Collisions with comets and asteroids, Sci. Am (1996) 54.
6. A. Gruber and J. Gspann, Nanoparticle impact micromachining, J. Vac. Sci. Technol. B 15(6), Nov/Dec 1997, p. 2362.
7. D. Takeuchi, K. Fukushima, J. Matsuo, I. Yamada, Nucl. Instrum. Meth. B 121 (1997) 493.
8. L.P. Allen, Z. Insepov, C. Santeufemio, D.B. Fenner, W. Brooks, K.S. Jones, and I. Yamada, Craters on silicon surfaces created by gas cluster ion beam impacts, submitted to JAP, February 2002.
9. C. Santeufemio, AFM Analysis of Gas Cluster Ion Impact Craters and Smoothing, abstract accepted for Microscopy and Microanalysis 2002, Quebec City, Aug 4-8, 2002.
10. Z. Insepov, I. Yamada, Nucl. Instrum. Meth. B 112 (1996) 16.
11. www.epion.com.
12. H. Haberland, Clusters of Atoms and Molecules I, Chap.3, Springer Verlag, Berlin (1995).
13. J. Farges, M.F. DeFeraudy, B. Raoult and G. Torchet, Ber. Bunsenges. Phys. Chem 88, 211 (1984).
14. J. Won Lee and G.D. Stein, J. Phys. Chem 91, 2450 (1987).
15. R. Nix, An Intro.to Surface Chemistry, http://www.chem.qmw.ac.uk/surfaces/scc/ section 4.2, Dept. of Chemistry, Queen Mary University of London, January 1999.