Hard DLC film formation by gas cluster ion beam assisted deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 201, Issue 2, 2003, Pages 405-412

  Kitagawa, Teruyuki ^a,b   Yamada, Isao ^b   Toyoda, Noriaki ^b   Tsubakino, Harushige ^b   Matsuo, Jiro ^c   Takaoka, G H ^c   Kirkpatrick, Allen ^d  

^a Nomura Plating Co Ltd   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

^c KYOTO UNIVERSITY   (Japan)

^d Epion Corporation   (United States)

Author keywords

Ar cluster ion; C60; Diamond like carbon

Indexed keywords

ACCELERATION; DIAMOND LIKE CARBON FILMS; HARDNESS; HIGH TEMPERATURE EFFECTS; ION BOMBARDMENT; WEAR RESISTANCE;

CLUSTER IONS;

ION BEAM ASSISTED DEPOSITION;

EID: 0037322208     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01739-1     Document Type: Article

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