Fabrication of SOI micromechanical devices

VTT Publications

Volumn , Issue 559, 2005, Pages 3-87

  Kiihamäki, Jyrki ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

DRIE; Etching; HARMST; MEMS; Microfabrication; Micromechanics; Monolithic integration; Resonators; Silicon on insulator; SOI; Vacuum cavities

Indexed keywords

EID: 84884748683     PISSN: 12350621     EISSN: 14550849     Source Type: Book Series    
DOI: None     Document Type: Review

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