메뉴 건너뛰기





Volumn , Issue , 1997, Pages 903-906

Multi-layer enhancement to polysilicon surface-micromachining technology

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING (CMP); MECHANICAL FILMS; MULTILAYER SURFACE MICROMACHINING TECHNOLOGY; SURFACE TOPOGRAPHY;

EID: 84886448140     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (32)

References (14)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.