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Volumn 15, Issue 1, 1997, Pages 1-20

Critical review: Adhesion in surface micromechanical structures

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Indexed keywords


EID: 3943070464     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589247     Document Type: Review
Times cited : (766)

References (80)
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  • 32
    • 3943085243 scopus 로고    scopus 로고
    • note
    • Equation (5) differs from the expression given by Alley et al. in Ref. 10. The discrepancy stems from the fact that a constant condensate volume is assumed in Eq. (5), whereas a constant wetted area is assumed in Ref. 10. As far as in-use adhesion is concerned, we believe that the former assumption is more appropriate.
  • 62
    • 3943055811 scopus 로고    scopus 로고
    • U.S. Patent Nos. 5,331,454 and 5,411,769, both continuances of Series No. 612,946 filed 13 November 1990
    • L. Hornbeck, U.S. Patent Nos. 5,331,454 and 5,411,769, both continuances of Series No. 612,946 filed 13 November 1990.
    • Hornbeck, L.1
  • 69
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    • and references therein
    • G. M. Pharr et al., Appl. Phys. Lett. 68, 779 (1996), and references therein.
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 779
    • Pharr, G.M.1
  • 72
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    • D. J. Monk, D. S. Soane, and R. T. Howe, J. Electrochem. Soc. 141, 264 (1994); 141, 271 (1994).
    • (1994) J. Electrochem. Soc. , vol.141 , pp. 271
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    • Ph.D. thesis, Dept. of EECS, University of California at Berkeley, December
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    • (1990)
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    • M. W. Judy, Ph.D. thesis, Dept. of EECS, University of California at Berkeley, April 1994.
    • (1994)
    • Judy, M.W.1
  • 77
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    • U.S. Patent No. 5,314,572 24 May 1994
    • T. A. Core and R. T. Howe, U.S. Patent No. 5,314,572 24 May 1994.
    • Core, T.A.1    Howe, R.T.2
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    • in Ref. 13
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    • Bhushan, B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.