Permeable polysilicon etch-access windows for microshell fabrication

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 224-227

  Lebouitz, Kyle S ^a   Howe, Roger T ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENCAPSULATION; ETCHING; FABRICATION; GRAIN BOUNDARIES; HYDROFLUORIC ACID; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SILICON NITRIDE; SILICON WAFERS; SURFACES;

ETCH ACCESS WINDOWS; MICROSHELLS; SURFACE MICROMACHINING;

SEMICONDUCTING SILICON;

EID: 0029510931     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)