Sacrificial oxide etching compatible with aluminum metallization

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 225-228

  Gennissen, P T J ^a   French, P J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; METALLIZING; THERMOOXIDATION;

SACRIFICIAL ETCHING;

ETCHING;

EID: 0030692167     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)