Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insulator substrates and electron beam lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2760-2763

  Carr, D W ^a   Craighead, H G ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000232061     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589722     Document Type: Article

References (3)

1. A. N. Cleland and M. L. Roukes, Appl. Phys. Lett. 69, 2653 (1996).
2. J. A. Walker, K. W. Goossen, and S. C. Arney, J. Microelectromech. Systems 5, 45 (1996).
3. W. R. Wiszniewski, R. E. Collins, and B. A. Pailthorpe, Acta Chem. Scand. 43, 170 (1994).