14 MHz micromechanical oscillator

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 497-502

  Mattila, T ^a   Jaakkola, O ^a   Kiihamaki J ^a   Karttunen, J ^a   Lamminmaki T ^b   Rantakari, P ^b   Oja, A ^a   Seppa H ^a   Kattelus, H ^a   Tittonen, I ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Micromechanical oscillator; Oscillator noise

Indexed keywords

CAPACITANCE; CRYSTAL RESONATORS; ELECTRIC CONTACTS; ELECTRODES; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS; SPURIOUS SIGNAL NOISE; VIBRATIONS (MECHANICAL);

DEEP REACTIVE ION ETCHING; MICROMECHANICAL OSCILLATOR; OSCILLATOR NOISE; SILICON ON INSULATOR WAFER; SINGLE CRYSTAL SILICON MICROBRIDGE;

OSCILLATORS (ELECTRONIC);

EID: 0036544038     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00813-5     Document Type: Conference Paper

References (12)

1. Surface-micromachined 1 MHz oscillator with low-noise pierce configuration
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5. Measurement of mechanical resonance and losses in nanometer scale silicon wires
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7. Quality factors in micron- and submicron-thick cantilevers
8. Air damping in resonant micromechanical capacitive sensors
9. Non-linearity and hysteresis of resonant strain gauges
10. Modeling of non-linear micromechanical resonators and their simulation with harmonic-balance method