Silicon fusion bonding for pressure sensors.

Volumn , Issue , 1988, Pages 144-147

  Petersen, Kurt ^a   Barth, Phillip ^a   Poydock, John ^a   Brown, Joe ^a   Mallon Jr , Joseph ^a   Bryzek, Janusz ^a  

^a Lucas NovaSensor   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PIEZOELECTRIC TRANSDUCERS -- FABRICATION; SEMICONDUCTING SILICON -- BONDING; SENSORS -- PERFORMANCE;

MICROMECHANICAL STRUCTURES; PIEZORESISTIVE PRESSURE SENSORS; SILICON FUSION BONDING; SILICON/SILICON BONDING TECHNIQUE;

PRESSURE TRANSDUCERS;

EID: 0024129796     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)