Hexsil bimorphs for vertical actuation

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 99-102

  Keller, Chris G ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPRESSIVE STRENGTH; ETCHING; MOLDING; PIEZOELECTRIC MATERIALS; SEMICONDUCTING FILMS; SILICON WAFERS; TENSILE STRENGTH;

DISPLACEMENTS; ETCH RELEASE; HEXSIL BIMORPHS; POLYSILICON CANTILEVERS; SURFACE FILMS; VERTICAL ACTUATION; VERTICAL MOLD INJECTION;

MICROELECTRONIC PROCESSING;

EID: 0029489445     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)