Electrical and mechanical properties of micromachined vacuum cavities

Physica Scripta T

Volumn T114, Issue , 2004, Pages 195-198

  Kiihamaki J ^a   Ronkainen, H ^a   Haara A ^a   Mattila, T ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; HYDROFLUORIC ACID; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

ALUMINIUM METALLISATION; MICROMACHINED VACUUM CAVITIES; OXIDE LAYER ETCHING; SINGLE CRYSTAL SILICON;

VACUUM APPLICATIONS;

EID: 39549114797     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2004/T114/049     Document Type: Conference Paper

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