Three-axis SOI capacitive accelerometer with PLL C-V converter

Sensors and Actuators, A: Physical

Volumn 75, Issue 1, 1999, Pages 77-85

  Matsumoto, Y ^a   Nishimura, M ^a   Matsuura, M ^a   Ishida, M ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CALIBRATION; CAPACITANCE; CRYSTAL MICROSTRUCTURE; CURRENT VOLTAGE CHARACTERISTICS; MICROELECTRODES; PHOTORESISTS; PLASMA POLYMERIZATION; SENSITIVITY ANALYSIS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

CAPACITIVE ACCELEROMETERS; RESIST PLUGS;

MICROSENSORS;

EID: 0032636316     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00295-7     Document Type: Article

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