A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT)

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2002, Pages 1071-1074

  Saarilahti, Jaakko ^a   Blomberg, Martti ^a   Häärä, Ari ^a   Kattelus, Hannu ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRODES; ETCHING; POLYSILICON; POROUS SILICON; SILICON NITRIDE; TENSILE STRESS;

CAPACITIVE MICROMECHANICAL ULTRASONIC TRANSDUCER; POROUS POLYSILICON; SURFACE MICROMACHINING;

ULTRASONIC TRANSDUCERS;

EID: 0036995286     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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