Flash release - An alternative for releasing complex MEMS devices

Journal of Micromechanics and Microengineering

Volumn 14, Issue 12, 2004, Pages 1659-1664

  Deladi, S ^a   Svetovoy, V ^a   Krijnen, G J M ^a   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; HEAT TRANSFER; MICROMACHINING; NATURAL FREQUENCIES; NUCLEATION; SILICON WAFERS; SURFACE TENSION; WATER;

CAPILLARY FORCES; MICRO-SIZED STRUCTURES; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 10844230412     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/12/009     Document Type: Article

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