Polysilicon hollow beam lateral resonators

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 265-271

  Judy, Michael W ^a   Howe, Rogert T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES;

HOLLOW POLYSILICON BEAMS; POLYSILICON HOLLOW BEAM LATERAL RESONATORS;

RESONATORS;

EID: 0027147742     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)