HV NMOS transistor for IC/MEMS integration on SOI

Physica Scripta T

Volumn T114, Issue , 2004, Pages 110-112

  Jansson, Roope ^a   Ronkainen, Hannu ^a   Kiihamäki, Jyrki ^a   Mellin, Joni ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b Micro Analog Systems Oy   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; SILICON WAFERS; TRANSISTORS;

BULK WAFERS; LAYOUT PARAMETERS;

MEMS;

EID: 39549092584     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2004/T114/027     Document Type: Conference Paper

References (8)

1. Baltes H, Brand O, Hierlemann A, Lange D and Hagleitner C 2002 CMOS MEMS present and future Micro Electro Mechanical Systems, 2002 The 15th IEEE Int. Conf., 20-24 Jan 2002 p 459
2. Dalsa Semiconductor http://www.dalsasemi.com/foundry/mems.asp
3. 1996 ATHENA User's manual (Silvaco International)
4. Micro Analog Systems Oy http://www.mas-oy.com/technology.htm
5. 1996 ATLAS User's manual (Silvaco International)
6. Li Y Q, Salama C A T, Seufert M, Schvan P and King M 1994 Integration of High-Voltage NMOS Devices into a Submicron BiCMOS Process Using Simple Structural Changes Electron Devices Meeting 1994, Technical Digest International, Dec 1994 p 403
7. Li Y Q, Salama C A T, Seufert M, Schvan P and King M 1997 IEEE Trans. Electron. Dev. 44 331
8. Patent pending