Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 126-131

  Yun, Weijie ^a   Howe, Roger T ^a   Gray, Paul R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROMACHINING; SENSORS;

CMOS DETECTION CIRCUITRY; DIGITALLY FORCE-BALANCED ACCELEROMETER; ON-CHIP DETECTION CIRCUITRY;

ACCELEROMETERS;

EID: 0026997981     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)