Polysilicon microbridge fabrication using standard CMOS technology.

Volumn , Issue , 1988, Pages 148-150

  Parameswaran, M ^a   Baltes, H P ^a   Robinson, A M ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

SILICA -- ETCHING; SILICON AND ALLOYS -- APPLICATIONS;

CMOS TECHNOLOGY; FIELD OXIDE ETCHING; POLYSILICON MICROBRIDGE FABRICATION;

SENSORS;

EID: 0024136894     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)