Wet Etching of Silicon

Handbook of Silicon Based MEMS Materials and Technologies

Volumn , Issue , 2010, Pages 375-407

  Gosálvez, Miguel ^a   Zubel, Irena ^b   Viinikka, Eeva ^c  

^a NAGOYA UNIVERSITY   (Japan)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c Culmination Innovation   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84882842619     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-0-8155-1594-4.00024-3     Document Type: Chapter

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