Surface Chemical Control of Mechanical Energy Losses in Micromachined Silicon Structures

Journal of Physical Chemistry B

Volumn 107, Issue 51, 2003, Pages 14270-14277

  Wang, Yu ^a   Henry, Joshua A ^a   Zehnder, Alan T ^b   Hines, Melissa A ^a  

^a Department of Molecular Biology and Genetics   (United States)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; COMPOSITE MICROMECHANICS; ENERGY DISSIPATION; HYDROGEN; MICROMACHINING; NANOSTRUCTURED MATERIALS; OXIDATION; SILICA; STRESS ANALYSIS; SURFACE CHEMISTRY;

SURFACE AREA; SURFACE OXIDATION;

RESONATORS;

EID: 0345803813     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp0360164     Document Type: Article

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