Maskless etching of three-dimensional silicon structures in KOH

Sensors and Actuators, A: Physical

Volumn 57, Issue 1, 1996, Pages 47-52

  Li, Xinxin ^a   Bao, Minhang ^a   Shen, Shaoqun ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Anisotropic etching; Microstructures; Potassium hydroxide; Silicon

Indexed keywords

ACCELEROMETERS; CRYSTAL LATTICES; ETCHING; FABRICATION; MASKS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NUMERICAL ANALYSIS; POTASSIUM COMPOUNDS; SILICON WAFERS;

EDGE CUTTING; MASKLESS ETCHING; POTASSIUM HYDROXIDE; PRISMATIC EDGES; RECTANGULAR MESA; SILICON STRUCTURES;

SILICON SENSORS;

EID: 0030260406     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80094-5     Document Type: Article

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