Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures

New Journal of Physics

Volumn 9, Issue , 2007, Pages

  Xing, Y ^a,b   Gosalvez M A ^a,c   Sato, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b SOUTHEAST UNIVERSITY   (China)

^c AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; CELLULAR AUTOMATA; COMPUTER SIMULATION; DATA REDUCTION;

MACROSCOPIC ETCH RATES; MULTIVALUED SURFACES;

MEMS;

EID: 37249087959     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/9/12/436     Document Type: Article

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