Etchant anisotropy controls the step bunching instability in KOH etching of silicon

Physical Review Letters

Volumn 93, Issue 16, 2004, Pages

  Garcia, Simon P ^a   Bao, Hailing ^a   Hines, Melissa A ^a  

^a Department of Molecular Biology and Genetics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; DIFFUSION; ETCHING; MONTE CARLO METHODS; MORPHOLOGY; POTASSIUM COMPOUNDS; VISCOSITY;

ETCHANT ANISOTROPY; ETCHANT VISCOSITY; SOLUTION-PHASE REACTIONS; STEP BUNCHING;

SILICON;

EID: 19644401098     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevLett.93.166102     Document Type: Article

References (18)

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