Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

Sensors and Actuators, A: Physical

Volumn 154, Issue 2, 2009, Pages 192-203

  Pal, Prem ^a   Sato, Kazuo ^a   Shikida, Mitsuhiro ^a   Gosálvez, Miguel A ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Anisotropic etching; Concave and convex corners; MEMS; Microfluidic channels; Surfactant; TMAH; Undercutting

Indexed keywords

CONCAVE AND CONVEX CORNERS; MICROFLUIDIC CHANNELS; SURFACTANT; TMAH; UNDERCUTTING;

AMMONIUM COMPOUNDS; ANISOTROPY; ETHERS; FLUIDIC DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROFLUIDICS; POLYETHYLENE GLYCOLS; POLYETHYLENE OXIDES; SURFACE ACTIVE AGENTS;

ANISOTROPIC ETCHING;

EID: 69549096443     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.09.002     Document Type: Article

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