Evidence for the effect of carbon on oxygen precipitation in Czochralski silicon crystal

Journal of Applied Physics

Volumn 87, Issue 8, 2000, Pages 3669-3673

  Liu, Peidong ^a   Ma, Xiangyang ^a   Zhang, Jinxin ^a   Li, Liben ^a   Que, Duanlin ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343184298     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372397     Document Type: Article

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