Silicon anisotropic etching in alkaline solutions III: on the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH + IPA solutions

Sensors and Actuators, A: Physical

Volumn 84, Issue 1, 2000, Pages 116-125

  Zubel, Irena ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL STRUCTURE; MASKS; SILICON WAFERS; THREE DIMENSIONAL;

CRYSTALLOGRAPHIC PLANES; SILICON ANISOTROPIC ETCHING;

ETCHING;

EID: 0034247280     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00347-7     Document Type: Article

References (13)

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