Anisotropic etching of silicon as a tool for creating injection molding tooling surfaces

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1671-1680

  Werkmeister, Jaime ^a   Gosalvez, Miguel A ^b   Willoughby, Patrick ^a   Slocum, Alexander H ^a   Sato, Kazuo ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Anisotropic etching; Atomistic simulation; Micromolding; Wafer alignment

Indexed keywords

BONDING; COMPUTER SIMULATION; ETCHING; INJECTION MOLDING; MASKS; MONTE CARLO METHODS;

ANISOTROPIC ETCHING; ATOMISTIC SIMULATION; MICROINJECTION MOLDING; OFF-AXIS WAFER; SILICON INSERT; WAFER ALIGNMENT;

SILICON WAFERS;

EID: 33845524816     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.885989     Document Type: Article

References (14)

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