A cellular automaton-based simulator for silicon anisotropic etching processes considering high index planes

Journal of Micromechanics and Microengineering

Volumn 17, Issue 4, 2007, Pages

  Zhou, Zai Fa ^a   Huang, Qing An ^a   Li, Wei Hua ^a   Deng, Wei ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ANISOTROPIC ETCHING; CELLULAR AUTOMATA; COMPUTER SIMULATION; MEMS;

DYNAMIC ALGORITHM; INDEX PLANES; SILICON ANISOTROPIC ETCHING;

SEMICONDUCTING SILICON;

EID: 34249061785     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/4/S03     Document Type: Conference Paper

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