Micromachining process simulation using a continuous cellular automata method

Journal of Microelectromechanical Systems

Volumn 9, Issue 2, 2000, Pages 252-261

  Zhu, Zhenjun ^a   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; AUTOMATA THEORY; COMPUTER SIMULATION; COMPUTER SOFTWARE; PASSIVATION; REACTIVE ION ETCHING; THREE DIMENSIONAL;

ANISOTROPIC CRYSTALLINE ETCHING SIMULATION; CONTINUOUS CELLULAR AUTOMATA METHOD; MICROMACHINING PROCESS SIMULATION;

MICROMACHINING;

EID: 0033717708     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.846706     Document Type: Article

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