Anisotropic etching of silicon on {111} and near {111} planes

Sensors and Materials

Volumn 13, Issue 5, 2001, Pages 303-313

  Songsheng, Tan ^a   Boudreau, Robert ^a   Reed, Michael L ^b  

^a Packaging/Assembly Core Technol C   (United States)

^b University of Virginia   (United States)

Author keywords

Anisotropic; Energy; Etching; KOH; Silicon

Indexed keywords

EID: 0035648291     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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