Faster simulations of step bunching during anisotropic etching: Formation of zigzag structures on Si(1 1 0)

Journal of Micromechanics and Microengineering

Volumn 17, Issue 4, 2007, Pages

  Gosalvez M A ^a   Xing, Y ^a   Hynninen, T ^b   Uwaha, M ^a   Foster, A S ^b   Nieminen, R M ^b   Sato, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; COMPUTER SIMULATION; DIFFUSION; MONTE CARLO METHODS; SURFACE MICROMACHINING;

INCREMENTAL ACTIVITY MONITORING (IAM) METHODS; STEP DENSITY MONITORING (SDM) METHOD; ZIGZAG STRUCTURES;

SEMICONDUCTING SILICON;

EID: 34249032465     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/4/S02     Document Type: Conference Paper

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