Precision microcomb design and fabrication for x-ray optics assembly

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2970-2974

  Sun, Yanxia ^a   Heilmann, Ralf K ^a   Chen, Carl G ^a   Forest, Craig R ^a   Schattenburg, Mark L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MASKS; NANOSTRUCTURED MATERIALS; PASSIVATION; PHOTORESISTORS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICA; SILICON ON INSULATOR TECHNOLOGY; SPACECRAFT OBSERVATORIES;

MICROCOMBS; MICROGRAPHS; X-RAY OBSERVATORY;

MICROELECTROMECHANICAL DEVICES;

EID: 0942278325     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1621668     Document Type: Conference Paper

References (9)

1. R. Petre et al., Proc. SPIE 4851, 433 (2003).
2. M. Weisskopf, B. Brinkman, C. Canizares, G. Garmire, S. Murray, and L. P. van Speybroeck, Publ. Astron. Soc. Pac. 114, 1 (2002).
3. B. Aschenbach, U. G. Briel, F. Haberl, H. W. Braeuninger, W. Burkert, A. Oppitz, P. Gondoin, and D. H. Lumb, Proc. SPIE 4012, 731 (2000).
4. W. A. Podgorski et al., Proc. SPIE 4851, 491 (2003).
5. C. G. Chen, L. M. Cohen, R. K. Heilmann, P. T. Konkola, O. Mongrard, G. P. Monnelly, and M. L. Schattenburg, J. Vac. Sci. Technol. B 18, 3272 (2000).
6. G. P. Monnelly et al., Proc. SPIE 4138, 164 (2000).
7. O. Mongrard, Master's thesis, Massachusetts Institute of Technology, Cambridge, MA, 2001.
8. C. R. Forest et al., Proc. SPIE 4851, 538 (2003).
9. C. R. Forest, Master's thesis, Massachusetts Institute of Technology, Cambridge, MA, 2003.