Fabrication techniques of convex corners in a (100)-silicon wafer using bulk micromachining: A review

Journal of Micromechanics and Microengineering

Volumn 17, Issue 10, 2007, Pages

  Pal, Prem ^a   Sato, Kazuo ^a   Chandra, Sudhir ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ETCHING; MICROFABRICATION; MICROMACHINING; PRESSURE SENSORS;

POTASSIUM HYDROXIDE SOLUTION; SEISMIC MASS; SILICON BULK MICROMACHINING; TETRAMETHYLAMMONIUM HYDROXIDE;

SILICON WAFERS;

EID: 34748875487     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/10/R01     Document Type: Review

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