Effect of Cu impurities on wet etching of Si(110): Formation of trapezoidal hillocks

New Journal of Physics

Volumn 10, Issue , 2008, Pages

  Hynninen, Teemu ^a   Gosálvez, Miguel A ^a   Foster, Adam S ^a   Tanaka, Hiroshi ^b   Sato, Kazuo ^c   Uwaha, Makio ^c   Nieminen, Risto M ^a  

^a AALTO UNIVERSITY   (Finland)

^b DENSO CORPORATION   (Japan)

^c NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; RANDOM PROCESSES; SURFACE ANALYSIS; WET ETCHING;

CORRELATED ADSORPTIONS; TRAPEZOIDAL HILLOCKS;

COPPER;

EID: 38649125252     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/10/1/013033     Document Type: Article

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