Evolution of surface roughness in KOH etching of silicon caused by material defects

Sensors and Materials

Volumn 15, Issue 1, 2003, Pages 37-42

  Haimi, Eero ^a   Lindroos, Veikko K ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

KOH etching; Material defects; Silicon; Surface roughness

Indexed keywords

EID: 0037272378     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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