Macroscopic etch anisotropies and microscopic reaction mechanisms: A micromachined structure for the rapid assay of etchant anisotropy

Surface Science

Volumn 460, Issue 1-3, 2000, Pages 21-38

  Wind, Rikard A ^a   Hines, Melissa A ^a  

^a Department of Molecular Biology and Genetics   (United States)

Author keywords

Alcohols; Alkali metals; Computer simulations; Etching; Silicon; Single crystal surfaces; Surface structure, morphology, roughness, and topography

Indexed keywords

EID: 0346479557     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(00)00479-9     Document Type: Article

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