Silicon microneedle formation using modified mask designs based on convex corner undercut

Journal of Micromechanics and Microengineering

Volumn 17, Issue 2, 2007, Pages 238-244

  Wilke, N ^a   Morrissey, A ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CUTTING; MASKS; MICROFABRICATION; POTASSIUM COMPOUNDS; SILICON; SOLUTIONS;

NEEDLE DENSITY; SILICON CONVEX CORNER; SILICON MICRONEEDLE;

MICROSTRUCTURE;

EID: 34249085645     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/2/008     Document Type: Article

References (12)

1. Prausnitz M 2004 Microneedles for transdermal drug delivery Adv. Drug Deliv. Rev. 56 581-7
2. Gerstel et al 1976 Drug delivery device US Patent 3 964 482
3. Reed M L and Lye W-K 2004 Microsystems for drug and gene delivery Proc. IEEE 92 56-75
4. McAllister, Devin V, Allen M G and Prausnitz M R 2000 Microfabricated microneedles for gene and drug delivery Annu. Rev. Biomed. Eng. 2 289-313
5. Wilke N, Ye S-R, Mulcahy A and Morrissey A 2005 Process optimisation and characterisation of silicon microneedles fabricated by wet etch technology Microelectron. J. 36 650-6
6. Wilke N, O'Brien J, Casey G, Doody T, Soden D and Morrissey A 2005 Influence of electrode design on electric field distribution during electroporation 3rd European Medical and Biological Engineering Conf. EMBEC'05 (Prague, Czech Republic, November 2005)
7. Coulman S A, Barrow D, Anstey A, Gateley C, Morrissey A, Wilke N, Allender C, Brain K and Birchall J C 2006 Minimally invasive cutaneous delivery of macromolecules and plasmid DNA via microneedles Curr. Drug Deliv. 3 65-75
8. Offereins H L, Kohl K and Sandmaier H 1991 Methods for the fabrication of convex corners in anisotropic etching of (1 0 0) silicon in aqueous KOH Sensors Actuators A 25-27 9-13
9. Shikida M et al 2002 A model explaining mask-corner undercut phenomena in anisotropic silicon etching: a saddle point in the etching rate diagram Sensors Actuators A 97-98 758-63
10. Wilke N, Reed M L and Morrissey A 2006 The evolution from convex corner undercut towards microneedle formation: theory and experimental verification J. Micromech. Microeng. 16 808-14
11. Enoksson P 1997 New structure for corner compensation in anisotropic KOH etching J. Micromech. Microeng. 7 141-4
12. Scheibe C and Obermeier E 1995 Compensating corner undercutting in anisotropic etching of (1 0 0) silicon for chip separation J. Micromech. Microeng. 5 109-11