Differences in anisotropic etching properties of KOH and TMAH solutions

Sensors and Actuators, A: Physical

Volumn 80, Issue 2, 2000, Pages 179-188

  Shikida, Mitsuhiro ^a   Sato, Kazuo ^a   Tokoro, Kenji ^a   Uchikawa, Daisuke ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPOSITION EFFECTS; CRYSTAL ORIENTATION; ETCHING; POTASSIUM COMPOUNDS; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

ANISOTROPIC ETCHING;

MICROSENSORS;

EID: 0033888241     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00264-2     Document Type: Article

References (16)

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