Electron beam deposition for nanofabrication: Insights from surface science

Surface Science

Volumn 605, Issue 3-4, 2011, Pages 257-266

  Wnuk, J D ^a,b   Rosenberg, S G ^a   Gorham, J M ^a   Van Dorp, W F ^c,d   Hagen, C W ^d   Fairbrother, D H ^a  

^a JOHNS HOPKINS UNIVERSITY   (United States)

^b PRINCETON UNIVERSITY   (United States)

^c UNIVERSITY OF GRONINGEN   (Netherlands)

^d DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Electron beam induced deposition; Electron microscopy; Electron molecule interactions; Electron solid interactions; Mass spectrometry; Organometallics; Photoelectron spectroscopy

Indexed keywords

DEPOSITION; ELECTRON BEAMS; ELECTRON IRRADIATION; ELECTRON MICROSCOPY; ELECTRONS; LITHOGRAPHY; MASS SPECTROMETRY; NANOSTRUCTURES; ORGANOMETALLICS; PHOTOELECTRON SPECTROSCOPY; THICK FILMS;

ELECTRON BEAM DEPOSITIONS; ELECTRON BEAM-INDUCED DEPOSITION; ELECTRON MOLECULES; ELECTRON-SOLID INTERACTION; FREE-STANDING STRUCTURES; ORGANOMETALLIC PRECURSORS; QUANTITATIVE INFORMATION; REACTION CROSS-SECTIONS;

SURFACE REACTIONS;

EID: 78651229374     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2010.10.035     Document Type: Short Survey

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