In situ monitoring and control of material growth for high resolution electron beam induced deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2210-2214

  Van Dorp, W F ^a   Hagen, C W ^a   Crozier, P A ^b   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITED MATERIALS; MASS RESOLUTION; MATERIAL GROWTH;

DEPOSITION; FEEDBACK CONTROL; GROWTH RATE; POLYMERIC MEMBRANES;

ELECTRON BEAMS;

EID: 37149030027     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2804603     Document Type: Article

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