Annealing of electron beam induced deposits of platinum from Pt (PF3) 4

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2250-2254

  Ervin, Matthew H ^a   Chang, Daniel ^a   Nichols, Barbara ^a   Wickenden, Alma ^a   Barry, John ^b   Melngailis, John ^b  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b The Institute for Research in Electronics and Applied Physics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DOSE RATES; ELECTRON BEAM INDUCED DEPOSITION (EBID); POLYMER FIBERS;

ANNEALING; CARBON NANOTUBES; DEPOSITION; ELECTRIC CONDUCTIVITY; NANOWIRES; PLATINUM; SHRINKAGE;

ELECTRON BEAMS;

EID: 37149023181     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2806978     Document Type: Article

References (11)

1. I. Utke, P. Hoffmann, B. Dwir, K. Leifer, E. Kapon, and P. Doppelt, J. Vac. Sci. Technol. B 18, 3168 (2000).
2. T. Brintlinger, J. Vac. Sci. Technol. B 23, 3174 (2005).
3. H. Hiroshima and M. Komuro, Jpn. J. Appl. Phys., Part 1 36, 7686 (1997).
4. J. D. Barry, M. Ervin, J. Molstad, A. Wickenden, T. Brintlinger, P. Hoffmann, and J. Melngailis, J. Vac. Sci. Technol. B 24, 3165 (2006).
5. Army Research Laboratory/University of Maryland (unpublished work).
6. A. D. Della Ratta, J. Melngailis, and C. V. Thompson, J. Vac. Sci. Technol. B 11, 2195 (1993).
7. P. G. Blauner, Y. Butt, J.-S. Ro, C. V. Thompson, and J. Melngailis, J. Vac. Sci. Technol. B 7, 1816 (1989).
8. A. Botman, J. J. L. Mulders, R. Weemaes, and S. Mentink, Nanotechnology 17, 3779 (2006).
9. H. W. P. Koops, C. Schossler, A. Kaya, and M. Weber, J. Vac. Sci. Technol. B 14, 4105 (1996).
10. S. Wang, Y.-M. Sun, Q. Wang, and J. M. White, J. Vac. Sci. Technol. B 22, 1803 (2004).
11. P. Seuret, F. Cicoira, T. Ohta, P. Doppelt, P. Hoffmann, J. Weber, and T. A. Wesolowski, Phys. Chem. Chem. Phys. 5, 268 (2003).