Transmission-electron-microscopy observation of Pt pillar fabricated by electron-beam-induced deposition

Japanese Journal of Applied Physics

Volumn 48, Issue 6 PART 2, 2009, Pages

  Murakami, Katsuhisa ^a   Matsubara, Naoki ^a   Ichikawa, Satoshi ^a   Kisa, Toshiya ^a   Nakayama, Takahito ^a   Takamoto, Kunio ^a   Wakaya, Fujio ^a   Takai, Mikio ^a   Petersen, Silke ^b   Amon, Brigitte ^b   Ryssel, Heiner ^b  

^a OSAKA UNIVERSITY   (Japan)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON MATRIX; AVERAGE GRAIN SIZE; BEFORE AND AFTER; ELECTRON BEAM-INDUCED DEPOSITION; ELECTRON TRANSPORT; GRAIN SIZE; OXYGEN GAS; PT NANOWIRES; TIP SURFACES;

AMORPHOUS CARBON; ANNEALING; COALESCENCE; ELECTRIC WIRE; ELECTRONS; GRAIN SIZE AND SHAPE; OXYGEN; PLANTS (BOTANY); PLASMAS; PLATINUM; TRANSMISSION ELECTRON MICROSCOPY;

NANOCRYSTALS;

EID: 70249138747     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.06FF12     Document Type: Article

References (12)

1. H. W. Koops, A. Kaya, and M. Wever: J. Vac. Sci. Technol. 13 (1995) 2400.
2. K. L. Lee and M. Hatzakis: J. Vac. Sci. Technol. (1989) 1941.
3. S. Matsui and K. Mori: J. Vac. Sci. Technol. (1986) 299.
4. S. Lipp, L. Frey, C. Lehrer, B. Frank, E. Demm, S. Pauthner, and H. Ryssel: J. Vac. Sci. Technol. 14 (1996) 3920.
5. K. Murakami, F. Wakaya, and M. Takai: J. Vac. Sci. Technol. 25 (2007) 1310.
6. K. Murakami, S. Nishihara, N. Matsubara, S. Ichikawa, F. Wakaya,and M. Takai: J. Vac. Sci. Technol. 27 (2009) 721.
7. Y. Tsukatani, N. Yamasaki, K. Murakami, F. Wakaya, and M. Takai:Jpn. J. Appl. Phys. 44 (2005) 5683.
8. F. Wakaya, Y. Tsukatani, N. Yamasaki, K. Murakami, S. Abo, and M. Takai: J. Phys.: Conf. Ser. 38 (2006) 120.
9. L. Rotkina, S. Oh, J. N. Eckstein, and S. V. Rotkin: Phys. Rev. 72 (2005) 233407.
10. Y. K. Park, M. Takai, C. Lehrer, L. Frey, and H. Ryssel: Jpn. J. Appl.Phys. 37 (1998) 7042.
11. P. C. Hoyle, J. R. A. Cleaver, and H. Ahmed: Appl. Phys. Lett. 64 (1994) 1448.
12. F. Wakaya, T. Nakayama, K. Takamoto, T. Takeuchi, N. Matsubara, K. Murakami, S. Ichikawa, S. Abo, and M. Takai: presented at 34th Int. Conf. Micro and Nano Engineering, 2008.