Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1139-1142

  Botman, A ^a   Hesselberth, M ^b   Mulders, J J L ^c  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b LEIDEN UNIVERSITY   (Netherlands)

^c Thermo Fisher Scientific   (United States)

Author keywords

Electron beam induced deposition; Nano fabrication

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; PLATINUM; RAPID PROTOTYPING; SCANNING ELECTRON MICROSCOPY;

BULK METAL RESISTIVITY; CONTACT ELECTRODES; ELECTRON-BEAM-INDUCED DEPOSITION;

NANOSTRUCTURED MATERIALS;

EID: 44149110141     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.036     Document Type: Article

References (10)

1. Randolph S.J., Fowlkes J.D., and Rack P.D. Crit. Rev. Solid State Mater. Sci. 31 (2006) 55-89
2. Silvis-Cividjian N., Hagen C.W., and Kruit P. J. Appl. Phys. 98 (2005) 084905
3. van Dorp W.F., van Someren B., Hagen C.W., Kruit P., and Crozier P.A. NanoLetters 5 (2005) 1303-1307
4. Botman A., Mulders J.J.L., Weemaes R., and Mentink S. Nanotechnology 17 (2006) 3779-3785
5. Molhave K., Madsen D.N., Dohn S., and Boggild P. Nanotechnology 15 (2004) 1047-1053
6. Brintlinger T., Fuhrer M.S., Melngailis J., Utke I., Bret T., Perentes A., Hoffmann P., Abourida M., and Doppelt P. J. Vac. Sci. Technol. B 23 (2005) 3174-3177
7. Koops H.W.P., Schoessler C., Kaya A., and Weber M. J. Vac. Sci. Technol. B 14 (1996) 4105-4109
8. Lau Y.M., Chee P.C., Thong J.T.L., and Ng V. J. Vac. Sci. Technol. A 20 (2002) 1295-1302
9. Evactron Plasma Cleaner, XEI Scientific Inc., .
10. Barry J.D., Ervin M., Molstad J., Wickenden A., Brintlinger T., Hoffman P., and Melngailis J. J. Vac. Sci. Technol. B 24 6 (2006) 3165-3168